In this study, we prepared transparent and conductive Al-doped zinc oxide (AZO) thin films on polyethylene naphthalate (PEN) substrates by radio frequency magnetron sputtering at low temperatures and investigated their structural, optical, and electrical properties. Prior to the deposition of AZO films, the PEN substrate was subjected to ultraviolet/ozone (UV/O3) cleaning for 20 min to improve its adhesion to the AZO films. After the UV/O3 cleaning, AZO deposition was carried out by varying the deposition conditions such as the sputtering pressure, substrate temperature, and sputtering power. The resistivity and the average transmittance in the visible range of the AZO films prepared at a sputtering power of 40 W, sputtering pressure of 0.4 Pa, and substrate temperature of 50 °C were found to be 2.84 ×10−3 Ω･cm and 90%, respectively.
Article PDFPDF (For Download)